Preparation of Titanum-Zirconium-Vanadium films by quantitative deposition
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چکیده
منابع مشابه
Vacuum Pumping Study of Titanium-zirconium-vanadium Thin Films*
VACUUM PUMPING STUDY OF TITANIUM-ZIRCONIUM-VANADIUM THIN FILMS* Yulin Li and Simon Ho, LEPP, Cornell University, Ithaca, NY 14853, USA Abstract Vacuum pumping via non-evaporable getter (NEG) thin film deposited directly onto the interior of a vacuum chamber is a novel way to achieve extreme high vacuum. As part of R&D efforts for the proposed Energy Recovery Linac at Cornell, the pumping perfor...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2019
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/1350/1/012166